X行程:100mm Z1行程:40mm X軸:±(1.2+L/300)μm Z1軸:±(1+2H/100)μm
X行程:100mm Z1行程:50mm 精度1:±(1+L/300)μm 精度2:±(0.8+2H/100)μm
X行程:120mm Z1量程:50mm X軸:±(1+L/300) μm Z1軸:±(0.8+2H/100) μm
X行程:150mm Z1行程:50mm X軸:±(1+L/300)μm Z1軸:±(0.8+2H/100)μm
X行程:220mm Z1行程:60mm X軸:±(1+L/300)μm Z1軸:±(0.8+2H/100)μm
X行程:320mm Z1行程:60mm X軸:±(1+L/300)μm Z1軸:±(0.8+2H/100)μm